Quark Technology Co.,Ltd.

12inch Excimer UV irradiation unit

Top page Products information 12inch Excimer UV irradiation unit

12inch Excimer UV irradiation unit  QEV360

Application

  • UV / O3 cleaning
  • Dry Etch / Dry Ashing
  • UV anneal
  • UV Cure
  • CVD etc....

Specification

Power supply unit

Rated power 1.5KW / 1unit
Power supply voltage AC100V
Dimension 480(W)×439(D)×300(H)mm
Weight ca.15kg

Lamp housing

Lamp 6 lamps (wavelength 172nm)
Quarz window 10mW/cm2
For vacuum 60mW/cm2
Irradiation surface 340×340mm
Dimension 600(W)×700(D)×375(H)mm
Weight ca.38kg
Cooling Water cooling , Nitrogen
MAIL
12inch Excimer UV irradiation unit QEV360
12inch Excimer UV irradiation unit QEV360
12inch Excimer UV irradiation unit QEV360 Drawing QEV360 Drawing
* Expansion window by click.

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300mm high power Excimer UV irradiation unit  QEF300

Application

  • UV / O3 cleaning
  • Dry Etch / Dry Ashing
  • UV anneal
  • UV Cure
  • CVD etc....

Specification

Power supply unit

Rated power 1.2KW/1unit
Power supply voltage AC200V
Dimension 430(W)×550(D)×220(H)mm
Weight 32kg
Cooling Water

Lamp housing

Lamp flat lamps (wavelength 172nm)
Irradiation ambient30mW/cm2
vacuum100mW/cm2
Difference±5%
Irradiation surface Φ320mm
Dimension 600(W)×632(D)×280(H)mm
Weight ca.70kg
Cooling Water cooling , Nitrogen
Function

Irradiation monitor

Power control

Vacuum chamber available
New product 126nm VUV irradiation unit

  ＊222nm 15mW/cm2
MAIL
300mm high power Excimer UV irradiation unit QEF300
300mm high power Excimer UV irradiation unit QEF300
300mm high power Excimer UV irradiation unit QEF300 QEF300 Drawing
* Expansion window by click.
300mm高出力照射装置QEF300電源外観図 QEF300 Power supply unit Drawing
* Expansion window by click.