- 2015.8.7
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Compact Excimer UV Irradiation Unit
Economy model designed for R&D and small materials
Product name Compact Excimer UV Irradiation Unit Applications Surface cleaning, Surface modification Wavelength 172nm Irradiation length 25×172mm Irradiance Lamp tube surface 70mW/cm2
- 2015.8.7
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In-line type UV-LED Irradiation Unit
In-line type UV-LED irradiation unit suitable for conveyor irradiation such as printing and roll-to-roll process
Product name In-line type UV-LED Irradiation Unit Aplications UV ink curing, Coating agent curing Wavelength 365, 385, 395, 405nm (in any combination) Irradiance WD=20mm 4000mW/cm2
Quark's excimer lamp VUV enables your new applications without wet cleaning process.
Quark pursues further developments in application fields of our vacuum ultraviolet excimer lamps in semiconductor, biotechnology, environmental science, and polymer processing for a future.In an immediate future, the low-k dielectric film residue removal by the excimer lamp VUV irradiation will be used in the production environment. At one of our customers sites, the experiment is giving us consistently positive results.
Headquarters factory
167 kinokochou ibara okayama japan
TEL +81-866-62-1367
Tokyo Office
Ichigo Takadanobaba Bld. 5F1-29-8 Takadanobaba, Shinjyuku-ku, Tokyo, 169-0075, Japan
TEL:+81-3-6205-5260
Fax:+81-3-6233-9730