Quark Technology Co.,Ltd.

Introduction of Excimer Irradiation system

Top page Products information Introduction of Excimer Irradiation system

Flat panel

Application

  • Dry Cleaning processes
  • Resist residue removal
  • Organic Cleaning of COG
  • EL panel Substrate bonding
Flat panel

Photomask

Application

  • Dry Cleaning processes
  • Resist residue removal
Photomask

Semiconductor

Application

  • Dry Cleaning processes
  • Resist residue removal
  • VUV Dry Ashing
  • VUV Photo Oxidation
  • VUV Modifying Properties Low-k films
Semiconductor

Others

  • LED,LD
  • Organic films

Application

  • Surface-active Processes
  • Dry Cleaning processes
  • films cuar