Quark Technology Co.,Ltd.

Excimer VUV Lamps

Top page Products information Excimer VUV Lamps

Excimer VUV Lamps  QEF35ST

Application

  • VUV cleaning
  • Dry Etch
  • Dry Ashing
  • UV anneal
  • UV Cure
  • CVD
  • Materials evaluation etc...

Specification

Power supply unit

Rated power 200W
Power supply voltage AC100V
Dimension 480(W)×439(D)×149(H)mm
Weight ca.5kg

Lamp housing

Lamp TYPE1 126nm 5mW/cm2
TYPE2 172nm 15mW/cm2
TYPE3 193nm 10mW/cm2
TYPE4 222nm 10mW/cm2
Irradiation surface 35φmm
Dimension 180(W)×180(D)×400(H)mm
Weight ca.6kg
Cooling Water cooling , Nitrogen
* 126nm,193nm need dischargegas 5L/min
MAIL
Excimer VUV LampsQEF35ST外観 Excimer VUV Lamps QEF35ST
Excimer VUV LampsQEF35ST外観 QEF35ST Drawing
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