Quark Technology Co.,Ltd.

8inch Excimer UV irradiation unit

Top page Products information 8inch Excimer UV irradiation unit

8inch Excimer UV irradiation unit  QEV230

Application

  • UV / O3 cleaning
  • Dry Etch / Dry Ashing
  • UV anneal
  • UV Cure

Specification

Power supply unit

Rated power 700W/1unit
Power supply voltage AC100V
Dimension 480(W)×439(D)×149(H)mm
Weight ca.8kg

Lamp housing

Lamp 4 lamps (wavelength 172nm)
Irradiation 10mW/cm2 Difference±15%
Irradiation surface 230×230mm
Dimension 418(W)×568(D)×289(H)mm
Weight ca.18kg
Cooling Water cooling , Nitrogen

  * 222nm 10mW/cm2
MAIL
8inch Excimer UV irradiation unit QEV230 8inch Excimer UV irradiation unit QEV230
8inch Excimer UV irradiation unit QEV230 QEV230 Drawing
* Expansion window by click.
6inch Excimer UV irradiation unit QEV230Power supply unit Drawing QEV230Power supply unit Drawing
* Expansion window by click.

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8inch high power Excimer UV irradiation unit  QEF230

Application

  • UV / O3 cleaning
  • Dry Etch / Dry Ashing
  • UV anneal
  • UV Cure
  • CVD etc....

Specification

Power supply unit

Rated power 1KW/1unit
Power supply voltage AC200V
Dimension 505(W)×545(D)×120(H)mm
Weight 1ca.8kg
Cooling Water

Lamp housing

Lamp flat lamps (wavelength 172nm)
Irradiation 30mW/cm2 Difference±5%
Irradiation surface 218×218mm
Dimension 450(W)×440(D)×185(H)mm
Weight 17kg
Cooling  
Function

Irradiation monitor

Power control

Vacuum chamber available
New product 126nm VUV irradiation unit

  * 222nm 15mW/cm2
MAIL
8inch high power Excimer UV irradiation unit QEF230 8inch high power Excimer UV irradiation unit QEF230
8inch high power Excimer UV irradiation unit QEF230 QEF230 Drawing
* Expansion window by click.
6inch high power Excimer UV irradiation unit QEF230Power supply unit Drawing QEF230Power supply unit Drawing
* Expansion window by click.